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Airflow Sensors AWM3000 Series
Microbridge Mass Airflow/Amplified
Honeywell1 Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
71
FEATURES
1Laser trimmed for improved sensor
interchangeability
1Flow sensing up to 1.0 SLPM
1Low differential pressure sensing
Like the AWM2000 Series, the dual
Wheatstone bridges control airflow mea-
surement. The AWM3000 Series is ampli-
fied; therefore, it can be used to increase
the gain and to introduce voltage offsets
to the sensor output. The schematic in
Figure 3 depicts the amplification circuitry
on board the sensor. Also, the heater con-
trol circuit (see Figure 1) and the sensing
bridge supply circuit (see Figure 2) are on
board the package.
Figure 1
Heater control circuit
Figure 2
Sensing bridge supply circuit
Figure 3
Differential instrumentation amplifier circuit
Airflow
AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 20.01 VDC, 25 C) . AWM31 Dov AWMCH 50V AWMazoov AWMJEDDV
Airflow Sensors AWM3000 Series
Microbridge Mass Airflow/Amplified
72
Honeywell1Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
AWM3000 SERIES ORDER GUIDE (Performance Characteristics @10.01 ±0.01 VDC, 25°C)
Catalog Listings AWM3100V AWM3150V AWM3200V AWM3300V
Flow Range (Full Scale) +200 sccm +30 sccm +1000 sccm
Pressure Range
(See Application Note 1) +2.0NH2O (5 mBar)
Output Voltage @ Trim Point 5 VDC @ 200 sccm 3.4 VDC @ 25 sccm 5 VDC @ 2NH2O 5 VDC @ 1000 sccm
Null Voltage 1.00 ±0.05 VDC 1.00 ±0.10 VDC 1.00 ±0.08 VDC 1.00 ±0.10 VDC
Null Voltage Shift, Typ.
+25°to 25°C, 25°to +85°C±25 mV ±100 mV ±25 mV ±25 mV
Output Voltage Shift, Max.
+25°to 25°C4% Reading ±5% Reading +24% Reading (Note 3) 5% Reading
+25°to +85°C+4% Reading ±5% Reading 24% Reading +5% Reading
Repeatability & Hysteresis, Max. ±0.50% Reading ±1% Reading ±0.50% Reading ±1% Reading
Min. Typ. Max.
Excitation VDC (Note 2) 8.0 10±0.01 15
Power Consumption (mW) 50 60
Response Time (msec) (Note 1) 1.0 3.0
Common Mode Pressure (psi) 25
Temperature Range Operating: 25°to +85°C (13°to +185°F); Storage: 40°to +90°C (40°to +194°F)
Termination 2,54 mm (.100N) centers, 0,635 mm (0.025N) square
Weight (grams) 10.8
Shock Rating 100 g peak (5 drops, 6 axes)
Notes:
1. Initial warm-up time for signal conditioned circuitry is 1 minute max.
2. Output Voltage is ratiometric to supply voltage.
3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. (See Application Note 1.)
4. Maximum allowable rate of flow change to prevent damage: 5 SLPM/1 sec.
MOUNTING DIMENSIONS (for reference only)
Note: Positive flow direction is defined as proceeding from
Port 1 (P1) to Port 2 (P2) and results in positive output. Do not
exert a force greater than 4.54kg (10 lbs.) in any direction.
AWM3100V OulplflVollago vs Flow AWWISOV 0‘:qu Voltage vs Flaw g A a Q g i u 25 so 75 100 ‘25 150 175 o 5 10 ‘5 20 a so VassFlow (seem) Mass-Flow (Mom) AWM3200V AWMSBOOV Output voltage vs Flow 6 5 g 6 4 a S 3 in a o 3 2 D 0'75 1 L25 L5 um. Pmsm (In‘ of n20) 026 0‘5 ‘75 o mozoosoomsoasoowasoogoowooo MawFlowtsccmp
Airflow Sensors AWM3000 Series
Microbridge Mass Airflow/Amplified
Honeywell1 Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
73
OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ±0.01 VDC, 25 C
AWM3100V AWM3150V AWM3200V (Note 2) AWM3300V
Press. Flow Nom. Tol. Press Flow Nom. Tol. Flow Press Nom. Tol. Press. Flow Nom. Tol.
mBar sccm VDC ±VDC mBar sccm VDC ±VDC sccm NH2O VDC ±VDC mBar sccm VDC ±VDC
0.49 200 5.00 0.15 2.50 30 3.75 0.70 60.0 2.00 5.00 0.15 3.40 1000 5.00 0.15
0.42 175 4.80 0.16 1.70 20 2.90 0.45 53.0 1.75 4.59 0.15 2.90 900 4.90 0.16
0.35 150 4.50 0.17 0.84 10 1.95 0.20 46.0 1.50 4.16 0.16 2.40 800 4.80 0.17
0.28 125 4.17 0.18 0.42 51.50 0.10 38.0 1.25 3.70 0.20 2.00 700 4.66 0.18
0.21 100 3.75 0.19 0.34 41.40 0.08 30.0 1.00 3.25 0.22 1.60 600 4.42 0.19
0.14 75 3.27 0.19 0.26 31.30 0.08 23.0 0.75 2.65 0.22 1.20 500 4.18 0.20
0.09 50 2.67 0.17 0.17 21.20 0.07 16.0 0.50 2.15 0.19 0.80 400 3.82 0.21
0.04 20 1.90 0.13 0.08 11.10 0.06 8.0 0.25 1.55 0.11 0.54 300 3.41 0.19
0.00 01.00 0.05 0.00 01.00 0.05 0.0 0.00 1.00 0.08 0.31 200 2.96 0.17
0.12 100 2.30 0.14
0.00 01.00 0.10
Notes:
1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure.
Tolerance values apply to calibration type only.
2. Differential pressure calibrated devices are not recommended for flow measurement.
Use flow calibrated devices for flow measurement.
OUTPUT CURVES
Airflow
AWM3ODD SERIES ORDER GUIDE (Performance Characteristics @10.01 20.01 VDC, 25 C) . Awmazaocm AWM3201 CR‘ AWMJEDEV
Airflow Sensors AWM3000 Series
Microbridge Mass Airflow/Amplified
74
Honeywell1 Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 ±0.01 VDC, 25°C)
Catalog Listings AWM3200CR* AWM3201CR* AWM3303V
Flow Range (Full Scale) ±1000 sccm (1 SLPM)
Differential Pressure Range 0 - 2NH2O (5 mBar) 0 - 0.5NH2O (1.25 mBar)
Output Type 4 - 20 mA DC (linear) 4 - 20 mA DC (linear) 1 - 5 VDC (Note 2)
Output @ Trim Point 20.0 ±1 mA DC @ 2NH2O 20.0 ±1 mA DC @ .05NH2O 5.00 ±0.150 VDC
Null Output 4.00 ±0.3 mA DC 4.00 ±0.4 mA DC 3.00 ±0.050 VDC
Null Shift
+25°to 25°C, +25°to +85°C±2 mA DC (max.) ±2 mA DC (max.) ±.050 VDC (max.)
Output Shift
+25°to 25°C+24% Reading +32% Reading 5% Reading
+25°to +85°C31% Reading (Note 3) 32% Reading (Note 3) +5% Reading
Linearity Error ±5% Reading ±5% Reading N/A
External Output Load 100 - 300 (Note 4) 100 - 300 (Note 4) N/A
Response Time (Note 1) 60 msec (max.) 60 msec (max.) 3 msec (max.)
Repeatability & Hysteresis, Max. ±0.50% Reading ±0.50% Reading ±1% Reading
Excitation VDC 10 ±0.01 10±0.01 8-15
Power Consumption (mW) 50 100
Common Mode Pressure (psi) 25
Calibration Gas Nitrogen
Temperature Range Operating: 25°to +85°C (13°to +185°F); Storage: 40°to +90°C (40°to +194°F)
Termination 2,54 mm (.100N) centers, 0,635 mm (0.025N) square
Weight (grams) 10.8
Shock Rating 100 g peak (5 drops, 6 axes)
Notes:
1. Initial warm-up time for signal conditioned circuitry is 1 minute max.
2. Output Voltage is ratiometric to supply voltage.
3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature.
4. Output load connected from VOUT to GND (current sinking).
5. Maximum allowable rate of flow change to prevent damage: 5.0 SLPM/1.0 sec.
* A 5 micron filter must be used on differential pressure sensors.
MOUNTING DIMENSIONS (for reference only)
Note: Positive flow direction is defined as proceeding from
Port 1 (P1) to Port 2 (P2) and results in positive output. Do not
exert a force greater than 4.54kg (10 lbs.) in any direction.
in» Oulpul (mA) Awmzoocn Awmzmcn 5 Outplfl Curran! V: DI". Press. 25 Outpul Cuvnm Vs DI". Prue. ° 2 5 5 s 5 D O 0.00 0.25 0.50 0 75 I 00 1.25 1.50 L75 2.00 0.0 0.1 nut Puss (- H20) AWM3303V ompm Vom- vs Flaw Output (V DC) 0! o-‘Nob 4000 -750 -500 - 0 0 250 500 ass-Flow (stem) Nomlnal JM
Airflow Sensors AWM3000 Series
Microbridge Mass Airflow/Amplified
Honeywell1 Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
75
OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ±0.01 VDC, 25 C
AWM3200CR (Note 2) AWM3201CR (Note 2) AWM3303V
Flow Press. Nom. Tol. Flow Press. Nom. Tol. Press Flow Nom. Tol.
sccm NH2O mA DC ±mA DC sccm NH2O mA DC ±mA DC mBar sccm VDC ±VDC
00.00 4.00 0.3 0 0.00 4.0 0.4 3.49 1000 5.00 0.15
70.25 5.75 0.3 35 0.10 7.2 0.4 2.42 800 4.82 0.18
15 0.50 7.70 0.4 42 0.13 8.0 0.4 1.59 650 4.67 0.20
22 0.75 9.75 0.4 53 0.17 9.4 0.5 0.83 400 4.42 0.20
25 0.81 10.21 0.5 61 0.20 10.4 0.5 0.31 200 3.96 0.15
30 1.00 12.00 0.6 71 0.25 12.0 0.6 0.00 03.00 0.05
37 1.25 13.90 0.7 81 0.30 13.6 0.7 -0.31 -200 2.03 0.18
45 1.50 16.00 0.8 87 0.35 15.2 0.8 -0.83 -400 1.62 0.20
52 1.75 18.00 0.8 97 0.40 16.8 0.9 -1.59 -600 1.35 0.25
55 1.83 18.50 0.9 105 0.45 18.4 1.0 -2.42 -800 1.15 0.30
60 2.00 20.00 1.0 113 0.50 20.0 1.0 -3.44 -1000 1.00 0.35
Notes:
1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure.
Tolerance values apply to calibration type only.
2. Differential pressure calibrated devices are not recommended for flow measurement.
Use flow calibrated devices for flow measurement.
OUTPUT CURVES
Airflow