Innovating MEMS Sensor Technology

MEMS products for device miniaturization and configuration of more advanced functions.

Omron provides various MEMS sensors to measure air volume, temperature and pressure, thus helping make your devices smarter and even more compact.

MEMS Flow Sensors

D6F-PH Series MEMS Differential Pressure Sensor

A Compact, High-accuracy Differential Pressure Sensor with Superior Resistance to Environments

D6F Series MEMS Flow Sensor
  • Economical
  • High accuracy of ±3%RD
  • Linearized and temperature compensated
  • Digital output (I2C communication)
  • High flow impedance to reduce the influence of bypass configuration
 Part NumberDescriptionBuy Now
D6F-PH Datasheet D6F-PH0025AD1 SENSOR AIRFLOW 0-250Pa PCB TERM Buy Now D6F-PH
D6F-PH Datasheet D6F-PH0505AD3 SENSOR AIRFLOW +/- 50Pa PCB TERM Buy Now D6F-PH
D6F-PH Datasheet D6F-PH5050AD3 SENSOR AIRFLOW +/- 500Pa PCB TERM Buy Now D6F-PH

D6F Series MEMS Flow Sensor

High Accuracy Mass Flow Sensing

D6F Series MEMS Flow Sensor
  • High Accuracy
  • Applicable to air, non-corrosive gas, natural gas
  • Low power consumption
  • Anti-dust performance
  • RoHS Compliant
 Part NumberDescriptionBuy Now
D6F-V Datasheet D6F-V03A1 AIRFLOW SENSOR 0-3 M/SEC 3.3V Buy Now D6F-V
D6F-W Datasheet D6F-W01A1 AIRFLOW SENSOR 0-1 M/SEC 12/24V Buy Now D6F-W
D6F-W Datasheet D6F-W04A1 AIRFLOW SENSOR 0-4 M/SEC 12/24V Buy Now D6F-W
D6F-W Datasheet D6F-W10A1 SENSOR AIRFLOW MNT 12/24V Buy Now D6F-W
D6F-P Datasheet D6F-P0010A2 SENSOR AIRFLOW 0-50KPA W/CONN Buy Now D6F-P
D6F-P Datasheet D6F-P0010A1 SENSOR AIRFLOW 0-50KPA PCB TERM Buy Now D6F-P
D6F-P Datasheet D6F-P0001A1 SENSOR FLOW TYPE 0.1 LPM MICRO Buy Now D6F-P
D6F-01/02/05 Datasheet D6F-01A1-110 SENSOR AIR FLOW TYPE 0-1LTR PLST Buy Now D6F
D6F-01/02/05 Datasheet D6F-02A1-110 SENSOR AIR FLOW TYPE 0-2LTR METL Buy Now D6F
D6F-03A3-000 Datasheet D6F-03A3-000 MASSFLOW SENSOR 0-3 LPM Buy Now D6F
D6F-10A, -20A, -50A Datasheet D6F-10A6-000 AIRFLOW SENSOR MEMS 10L/MIN Buy Now D6F
D6F-10A, -20A, -50A Datasheet D6F-20A5-000 FLOW SENSOR MEMS 20L/MIN Buy Now D6F
D6F-10A, -20A, -50A Datasheet D6F-20A6-000 AIRFLOW SENSOR MEMS 20L/MIN Buy Now D6F
D6F-10A, -20A, -50A Datasheet D6F-50A6-000 FLOW SENSOR MEMS 50L/MIN Buy Now D6F

MEMS Pressure Sensors

2SMPP MEMS Gauge Pressure Sensor

Featuring Small Size and Low Power Consumption

2SMPP MEMS Gauge Pressure Sensor
  • Ultra-miniature 6.1 × 4.7 × 8.2 mm (L × W × H)
  • Superior electrical characteristics
  • Economical solution
    • Offset voltage of -2.5±4 mV
    • Span voltage of 31.0±3.1 mV
  • Low Power consumption of 0.2 mW
  • Low Temperature Influence
 Part NumberDescriptionBuy Now
2SMPP Datasheet 2SMPP-02 SENSOR PRESSURE 0-5PSI 0-37KPA Buy Now 2SMPP
2SMPP Datasheet 2SMPP-03 SENSOR PRESSURE -7-7PSI-50-50KPA Buy Now 2SMPP

2SMPB Absolute Pressure Sensor

Piezo Resistive Bridge Technology with Integrated CMOS

2SMPB Absolute Pressure Sensor
  • Altitude Detection
  • High Accuracy ±6Pa (±50cm)
  • Low Power Consumption due to Automatic Sleep Mode
  • Compact package: 4mm x 4mm chip
  • Temperature rating: ±2º C
  • 24-Bit I2C Digital Output
 Part NumberDescriptionBuy Now
2SMPB-01-01 Datasheet 2SMPB-01-01 ABSOLUTE PRESSURE SNSR 30-110KPA Buy Now 2SMPB

MEMS Thermal Sensor

D6T Series MEMS Thermal Sensor

High Sensitivity Enables Detection of Stationary Human Presence

D6T Thermal Sensor
  • OMRON’s unique MEMS and ASIC technologies achieve a high SNR
  • Superior noise immunity with a digital output
  • High-precision area temperature detection with low crosstalk field of view characteristics
  • Application notes are available
  • RoHS compliant
 Part NumberDescriptionBuy Now
D6T Datasheet D6T44L06 PIR SENSOR 4X4 PIXEL THERMAL PCB Buy Now D6T
D6T Datasheet D6T8L06 PIR SENSOR 1X8 PIXEL THERMAL PCB Buy Now D6T