Omron offers a digital differential pressure-type MEMS mass-flow sensor
The D6F-PH digital differential pressure-type mass-flow sensor from Omron comes equipped with an I²C output, and utilizes the proprietary Omron mass-flow MEMS chip. However, the internal flow path has been redesigned to produce a low-flow, high-velocity/high-impedance sensor that will output a differential pressure. This sensor will be available in three models, each rated for a specific pressure range. The sensor can be calibrated for numerous different gases.