MEMS Flow Sensors

Patented Compact MEMS Flow Sensors Detect Clogged Filters

Image of Omron's Patented Compact MEMS Flow Sensors Detect Clogged FiltersThe Omron family of MEMS (MicroElectroMechanical System) Flow Sensors includes intelligent compact models capable of measuring flow velocity and mass flow rate movement with highly repeatable accuracy. These sensors are available to measure mass flow rates from 1 LPM to 50 LPM (Liters per Minute). High sensitivity is achieved with the MEMS Flow Chip.

The D6F-P, D6F-V, and D6F-W Sensors incorporate a Dust Segregation System (DSS) allowing them to be used to monitor the performance of fans , detect clogged filters in computers and projectors, and VAV control in commercial HVAC systems.

Features

  • Small size, due to MEMS technology
  • Flow Sensors, can be used with most medical, inert welding, an dcombustion gasses
  • Excellent repeatability and accuracy

Applications

  • Excellent for clogged filter detection and fan performance monitoring
  • Take air velocity readings behind filters, in pipes or ductwork
  • Proprietary MEMS technology
  • Dust Segregation System keeps particulate away from sensor chip

D6F

ImageManufacturer Part NumberDescriptionAvailable Quantity
D6F-V03A1 datasheet linkAIRFLOW SENSOR 0-3 M/SEC 3.3VD6F-V03A1AIRFLOW SENSOR 0-3 M/SEC 3.3V179 - Immediate
D6F-V03A1 product page link
D6F-P0010A1 datasheet linkSENSOR AIRFLOW 0-50KPA PCB TERMD6F-P0010A1SENSOR AIRFLOW 0-50KPA PCB TERM246 - Immediate
D6F-P0010A1 product page link
D6F-P0010A2 datasheet linkSENSOR AIRFLOW 0-50KPA W/CONND6F-P0010A2SENSOR AIRFLOW 0-50KPA W/CONN105 - Immediate
D6F-P0010A2 product page link
D6F-P0001A1 datasheet linkSENSOR FLOW TYPE 0.1 LPM MICROD6F-P0001A1SENSOR FLOW TYPE 0.1 LPM MICRO329 - Immediate
D6F-P0001A1 product page link
D6F-W01A1 datasheet linkAIRFLOW SENSOR 0-1 M/SEC 12/24VD6F-W01A1AIRFLOW SENSOR 0-1 M/SEC 12/24V314 - Immediate
110 - Factory Stock
D6F-W01A1 product page link
D6F-01A1-110 datasheet linkSENSOR AIR FLOW TYPE 0-1LTR PLSTD6F-01A1-110SENSOR AIR FLOW TYPE 0-1LTR PLST86 - Immediate
D6F-01A1-110 product page link
D6F-05N2-000 datasheet linkSENSOR GAS FLOW TYPE 0-5LTR METLD6F-05N2-000SENSOR GAS FLOW TYPE 0-5LTR METL244 - Immediate
D6F-05N2-000 product page link
D6F-50A6-000 datasheet linkFLOW SENSOR MEMS 50L/MIND6F-50A6-000FLOW SENSOR MEMS 50L/MIN31 - Immediate
D6F-50A6-000 product page link
D6F-W CABLE datasheet linkCABLE FOR D6F FLOW SENSOR 8"D6F-W CABLECABLE FOR D6F FLOW SENSOR 8"988 - Immediate
D6F-W CABLE product page link
D6F-CABLE2 datasheet linkCABLE FOR D6F MASSFLOW SENSORD6F-CABLE2CABLE FOR D6F MASSFLOW SENSOR625 - Immediate
D6F-CABLE2 product page link
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Published: 2012-06-29